Optical Materials : Microstructuring Surfaces with Off-Electrode Plasma Hardback
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique.
It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap.
A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
- Format: Hardback
- Pages: 211 pages, 123 Illustrations, black and white
- Publisher: Taylor & Francis Ltd
- Publication Date: 30/03/2017
- Category: Plasma physics
- ISBN: 9781138197282