Photomask Fabrication Technology PDF
by Benjamin G. Eynon, Banqiu Wu
Part of the Professional Engineering series
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Description
Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.
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- Format:PDF
- Pages:500 pages
- Publisher:McGraw Hill LLC
- Publication Date:11/08/2005
- Category:
- ISBN:9780071588911
Information
-
Download Now
- Format:PDF
- Pages:500 pages
- Publisher:McGraw Hill LLC
- Publication Date:11/08/2005
- Category:
- ISBN:9780071588911