Measurement Technology for Micro-Nanometer Devices Hardback
by Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue
Hardback
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Description
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale• Highlights the advanced research work from industry and academia in micro-nano devices test technology• Written at both introductory and advanced levels, provides the fundamentals and theories• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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Available to Order - This title is available to order, with delivery expected within 2 weeks
- Format:Hardback
- Pages:352 pages
- Publisher:John Wiley & Sons Inc
- Publication Date:30/12/2016
- Category:
- ISBN:9781118717967
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Information
-
Available to Order - This title is available to order, with delivery expected within 2 weeks
- Format:Hardback
- Pages:352 pages
- Publisher:John Wiley & Sons Inc
- Publication Date:30/12/2016
- Category:
- ISBN:9781118717967