Ion-Solid Interactions for Materials Modification and Processing: Volume 396, Hardback Book

Ion-Solid Interactions for Materials Modification and Processing: Volume 396 Hardback

Edited by Yang-Tse Cheng, Lloyd R. (AT&T Bell Laboratories, New Jersey) Harriott, Daryush (Alabama Agricultural and Mechanical University) Ila, David B. Poker, Thomas W. (Arizona State University) Sigmon

Part of the MRS Proceedings series

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Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition.

This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques.

Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.

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