Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing: Volume 259, Hardback Book

Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing: Volume 259 Hardback

Edited by C. Robert (Stanford University, California) Helms, Masataka (Hiroshima University, Japan) Hirose, Robert J. (North Carolina State University) Nemanich, Gary W. (IBM T J Watson Research Center, New York) Rubloff

Part of the MRS Proceedings series

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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