Introduction to Semiconductor Manufacturing Technology Paperback / softback
by Hong Xiao
Part of the Press Monographs series
Paperback / softback
- Information
Description
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines.
Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees.
Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology.
The text focuses on current fabrication technologies, but older technologies are discussed for historical context.
Information
-
Out of Stock - We are unable to provide an estimated availability date for this product
- Format:Paperback / softback
- Pages:698 pages
- Publisher:SPIE Press
- Publication Date:30/11/2012
- Category:
- ISBN:9781510616530
Other Formats
- Hardback from £99.70
Information
-
Out of Stock - We are unable to provide an estimated availability date for this product
- Format:Paperback / softback
- Pages:698 pages
- Publisher:SPIE Press
- Publication Date:30/11/2012
- Category:
- ISBN:9781510616530