CMOS Hotplate Chemical Microsensors PDF
by Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann
Part of the Microtechnology and MEMS series
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Description
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
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- Format:PDF
- Publisher:Springer Berlin Heidelberg
- Publication Date:19/04/2007
- Category:
- ISBN:9783540695622
Information
-
Download Now
- Format:PDF
- Publisher:Springer Berlin Heidelberg
- Publication Date:19/04/2007
- Category:
- ISBN:9783540695622
