Handbook of Microlithography, Micromachining, and Microfabrication Hardback
by P. Rai-Choudhury
Part of the Press Monographs series
Hardback
- Information
Description
Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns.
Volume Two focuses on the process technology and the device applicatio
Information
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Out of Stock - We are unable to provide an estimated availability date for this product
- Format:Hardback
- Pages:698 pages, illustrations
- Publisher:SPIE Press
- Publication Date:31/12/1997
- Category:
- ISBN:9780819423795
Other Formats
- Paperback / softback from £118.00
Information
-
Out of Stock - We are unable to provide an estimated availability date for this product
- Format:Hardback
- Pages:698 pages, illustrations
- Publisher:SPIE Press
- Publication Date:31/12/1997
- Category:
- ISBN:9780819423795