Fabrication Engineering at the Micro- and Nanoscale Paperback / softback
by Stephen A. Campbell
Part of the The Oxford Series in Electrical and Computer Engineering series
Paperback / softback
- Information
Description
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
Information
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Available to Order - This title is available to order, with delivery expected within 2 weeks
- Format:Paperback / softback
- Pages:688 pages
- Publisher:Oxford University Press Inc
- Publication Date:20/12/2012
- Category:
- ISBN:9780199861224
Information
-
Available to Order - This title is available to order, with delivery expected within 2 weeks
- Format:Paperback / softback
- Pages:688 pages
- Publisher:Oxford University Press Inc
- Publication Date:20/12/2012
- Category:
- ISBN:9780199861224
