Atomic Layer Growth and Processing Hardback
Edited by T.F. Kuech, P.D. Dapkus, Y. (Niigata University School of Medicine, Niigata, Japan) Aoyagi
Part of the Mrs Proceedings series
Hardback
- Information
Description
Featuring 46 papers from the 1991 MRS Spring Meeting (April 29 - May 3, Anaheim, California), this volume focuses on the technologically challenging field of atomic layer growth and processing.
The concept of atomic layer based processing is perhaps a primary road to both the degree of control and processing uniformity for both etching and deposition that the future demands of the semiconductor industry require.
Research areas covered include: mechanistic studies of atomic layer processes; characterization of atomic layer processes; III-V semiconductor studies; group IV semiconductor studies; II-VI semiconductor studies; high Tc superconductors and other materials.
Information
-
Unavailable
- Format:Hardback
- Pages:359 pages
- Publisher:Materials Research Society
- Publication Date:11/10/1991
- Category:
- ISBN:9781558991163
Information
-
Unavailable
- Format:Hardback
- Pages:359 pages
- Publisher:Materials Research Society
- Publication Date:11/10/1991
- Category:
- ISBN:9781558991163
