Measurement Technology for Micro-Nanometer Devices PDF
by Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue
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Description
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
Highlights the advanced research work from industry and academia in micro-nano devices test technology
Written at both introductory and advanced levels, provides the fundamentals and theories
Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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- Format:PDF
- Publisher:Wiley
- Publication Date:18/10/2016
- Category:
- ISBN:9781118717981
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Information
-
Download Now
- Format:PDF
- Publisher:Wiley
- Publication Date:18/10/2016
- Category:
- ISBN:9781118717981