MOEMS : Micro-opto-electro-mechanical Systems Hardback
by M.Edward Motamedi
Part of the Press Monographs series
Hardback
- Information
Description
This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field.
Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance.
MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging.
An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices.
It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.
Information
-
Available to Order - This title is available to order, with delivery expected within 2 weeks
- Format:Hardback
- Pages:676 pages, illustrations
- Publisher:SPIE Press
- Publication Date:31/01/2005
- Category:
- ISBN:9780819450210
Information
-
Available to Order - This title is available to order, with delivery expected within 2 weeks
- Format:Hardback
- Pages:676 pages, illustrations
- Publisher:SPIE Press
- Publication Date:31/01/2005
- Category:
- ISBN:9780819450210
